High Vacuum
High Vacuum
| Characteristics | Low Particle by Ceramic Ball Mechanism |
|---|---|
| Opeation | Manual / Pneumatic |
| Flange Type | ISO, JIS, ASA, CF |
| Feedthrough | Welded Bellows |
| Gate Seal | Viton O-Ring / Kalrez O-Ring |
| Bonnet Seal | Viton O-Ring |
| Response Time | ≤ 2 Sec |
| Operate Pressure Range | 1×10-10 torr to 1.4 bar |
| Differential pressure on the gate | 1.5 |
| Leak rate | < 1×10-10 torr ℓ/sec |
| Cycles until first service | 250,000 |
| Temperature for Valve Body | ≤ 200 °C |
| Temperature for Actuator | ≤ 80 °C |
| Bake Temperature | ≤ 150 °C |
| Materials | Stainless Steel304 , AL6061 Anodizing |
| Mounting Position | Any |
| Operating Pressure (N2) | 4~7kgf/cm2 |
| Flange Type | 1.5" ~ 14" |