High Vacuum
High Vacuum
Characteristics | Low Particle by Ceramic Ball Mechanism |
---|---|
Opeation | Manual / Pneumatic |
Flange Type | ISO, JIS, ASA, CF |
Feedthrough | Welded Bellows |
Gate Seal | Viton O-Ring / Kalrez O-Ring |
Bonnet Seal | Viton O-Ring |
Response Time | ≤ 2 Sec |
Operate Pressure Range | 1×10-10 torr to 1.4 bar |
Differential pressure on the gate | 1.5 |
Leak rate | < 1×10-10 torr ℓ/sec |
Cycles until first service | 250,000 |
Temperature for Valve Body | ≤ 200 °C |
Temperature for Actuator | ≤ 80 °C |
Bake Temperature | ≤ 150 °C |
Materials | Stainless Steel304 , AL6061 Anodizing |
Mounting Position | Any |
Operating Pressure (N2) | 4~7kgf/cm2 |
Flange Type | 1.5" ~ 14" |