High Vacuum


Large Gate Valve

Characteristics Low Particle by Ceramic Ball Mechanism / Easy Maintenance using Repair Parts Kit
Operating Pneumatic
Flange Size 16
Flange Type ISO, JIS, ASA
Feedthrough Viton O-ring
Gate Seal Viton O-ring / Kalrez O-ring
Bonnet Seal Viton O-ring Seal
Operating Pressure Range 1x10-8 torr to 1 bar
Differential pressure on the gate ≤ 1 bar
Leak rate < 1x10-9 torr l/sec
Cycles until first service 10,000~100,000
Temperature for Valve Body ≤150˚C
Temperature for Actuator ≤80˚C
Bake Temperature ≤150˚C
Materials Stainless Steel304, AL6061 Anodizing
Mounting Position Any
Operating Pressure (N2) 6~8kgf/cm2