Semi GV
Double prevention GV
| Characteristics | Double Prevention Function / Valve Controller (1CH ~ 4CH) |
|---|---|
| Opeation | Pneumatic |
| Flange Size (ID) | 4" ~ 10" |
| Flange Type | ISO, KF |
| Feedthrough | Welded Bellows |
| Gate Seal | Viton O-Ring / Kalrez O-Ring |
| Bonnet Seal | Viton O-Ring |
| Response Time | ≤ 0.3 Sec |
| Operate Pressure Range | 1×10-10 torr to 1.4 bar |
| Differential pressure on the gate | ≤ 1.4 bar |
| Leak rate | < 1×10-10 torr ℓ/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve Body | ≤ 200 °C |
| Temperature for Actuator | ≤ 80 °C |
| Bake Temperature | ≤ 150 °C |
| Materials | Stainless Steel304 , AL6061 Anodizing |
| Mounting Position | Any |
| Operating Pressure (N2) | 4~7kgf/cm2 |
| Contorller | Controller spec in Notice |