Slit GV
Transfer
Characteristics | Body Material : Aluminum or Stainless Steel / Easy Maintenance using Repair Parts Kit |
---|---|
Opeation | Pneumatic |
Flange Size (ID) | 32 x 222, 46 x 236, 50 x 336, 56 x 500 |
Feedthrough | Welded Bellows |
Gate Seal | Vulcanized Seal |
Bonnet Seal | Viton O-Ring |
Response Time | ≤ 2 Sec |
Operate Pressure Range | 1×10-8 torr to 1.2 bar |
Differential pressure on the gate | ≤ 1.2 bar |
Leak rate | Stain Less : < 1×10-9 torr ℓ/sec, Aluminum : <1×10-5 torr ℓ/sec |
Cycles until first service | 1,000,000 |
Temperature for Valve Body | Stainless Steel ≤ 200 °C, Aluminum ≤ 150 °C |
Temperature for Actuator | ≤ 80 °C |
Bake Temperature | ≤ 150 °C |
Materials | Stainless Steel304 , AL6061 Anodizing |
Mounting Position | Any |
Operating Pressure (N2) | 4~7kgf/cm2 |