Slit GV
Transfer
| Characteristics | Body Material : Aluminum or Stainless Steel / Easy Maintenance using Repair Parts Kit |
|---|---|
| Opeation | Pneumatic |
| Flange Size (ID) | 32 x 222, 46 x 236, 50 x 336, 56 x 500 |
| Feedthrough | Welded Bellows |
| Gate Seal | Vulcanized Seal |
| Bonnet Seal | Viton O-Ring |
| Response Time | ≤ 2 Sec |
| Operate Pressure Range | 1×10-8 torr to 1.2 bar |
| Differential pressure on the gate | ≤ 1.2 bar |
| Leak rate | Stain Less : < 1×10-9 torr ℓ/sec, Aluminum : <1×10-5 torr ℓ/sec |
| Cycles until first service | 1,000,000 |
| Temperature for Valve Body | Stainless Steel ≤ 200 °C, Aluminum ≤ 150 °C |
| Temperature for Actuator | ≤ 80 °C |
| Bake Temperature | ≤ 150 °C |
| Materials | Stainless Steel304 , AL6061 Anodizing |
| Mounting Position | Any |
| Operating Pressure (N2) | 4~7kgf/cm2 |