Special GV
Control system
Characteristics | Compact Design / Position Indication / Valve with Servo Motor / Monitor displays the position |
---|---|
Opeation | Pneumatic |
Flange Size (ID) | 2.5" ~ 16" |
Flange Type | ISO, JIS, ASA, CF |
Feedthrough | Servo Motor |
Gate Seal | Viton O-Ring / Kalrez O-Ring |
Bonnet Seal | Viton O-Ring |
Operate Pressure Range | 1×10-8 torr to 1.4 bar |
Differential pressure on the gate | ≤ 1.4 bar |
Leak rate | < 5×10-9 torr ℓ/sec |
Cycles until first service | 200,000 |
Temperature for Valve Body | ≤ 150 °C |
Materials | Stainless Steel304 |
Mounting Position | Any |