Special GV

Multi(3rd) Position

Characteristics Valve Open, Valve Close, 3rd POSITION / Equipment can read valve state through connect to 9 Pin D-Sub of the Valve
Opeation Pneumatic
Flange Size (ID) 2.5" ~ 12"
Flange Type ISO, JIS, ASA, CF
Feedthrough Welded Bellows
Gate Seal Viton O-Ring / Kalrez O-Ring
Bonnet Seal Viton O-Ring
Response Time ≤ 2 Sec
Operate Pressure Range 1×10-10 torr to 1.4 bar
Differential pressure on the gate ≤ 1.4 bar
Leak rate < 1×10-10 torr ℓ/sec
Cycles until first service 200,000
Temperature for Valve Body ≤ 200 °C
Temperature for Actuator ≤ 80 °C
Bake Temperature ≤ 150 °C
Materials Stainless Steel304 , AL6061 Anodizing
Mounting Position Any
Operating Pressure (N2) 4~7kgf/cm2