High Vacuum
Large Gate Valve
| Characteristics | Low Particle by Ceramic Ball Mechanism / Easy Maintenance using Repair Parts Kit |
|---|---|
| Operating | Pneumatic |
| Flange Size | 16 |
| Flange Type | ISO, JIS, ASA |
| Feedthrough | Viton O-ring |
| Gate Seal | Viton O-ring / Kalrez O-ring |
| Bonnet Seal | Viton O-ring Seal |
| Operating Pressure Range | 1x10-8 torr to 1 bar |
| Differential pressure on the gate | ≤ 1 bar |
| Leak rate | < 1x10-9 torr l/sec |
| Cycles until first service | 10,000~100,000 |
| Temperature for Valve Body | ≤150˚C |
| Temperature for Actuator | ≤80˚C |
| Bake Temperature | ≤150˚C |
| Materials | Stainless Steel304, AL6061 Anodizing |
| Mounting Position | Any |
| Operating Pressure (N2) | 6~8kgf/cm2 |