High Vacuum
Large Gate Valve
Characteristics | Low Particle by Ceramic Ball Mechanism / Easy Maintenance using Repair Parts Kit |
---|---|
Operating | Pneumatic |
Flange Size | 16 |
Flange Type | ISO, JIS, ASA |
Feedthrough | Viton O-ring |
Gate Seal | Viton O-ring / Kalrez O-ring |
Bonnet Seal | Viton O-ring Seal |
Operating Pressure Range | 1x10-8 torr to 1 bar |
Differential pressure on the gate | ≤ 1 bar |
Leak rate | < 1x10-9 torr l/sec |
Cycles until first service | 10,000~100,000 |
Temperature for Valve Body | ≤150˚C |
Temperature for Actuator | ≤80˚C |
Bake Temperature | ≤150˚C |
Materials | Stainless Steel304, AL6061 Anodizing |
Mounting Position | Any |
Operating Pressure (N2) | 6~8kgf/cm2 |