Semi GV
3 way hot valve
| Characteristics | Cartridge Heating Control type / Heating Jacket Mountable / Temp Controller |
|---|---|
| Opeation | Rotary Ball Type |
| Flange Size (ID) | KF40 - 50 |
| Flange Type | KF |
| Feedthrough | O-Ring Seal |
| Gate Seal | Viton O-Ring |
| Leak rate | 1×10-8 torr ℓ/sec |
| Cycles until first service | 30,000 |
| Temperature for Valve Body | ≤ 180 °C |
| Temperature for Actuator | ≤ 80 °C |
| Materials | Stainless Steel304 , AL6061 |
| Mounting Position | Any |
| Operating Pressure (N2) | 1.5~7kgf/cm2 |