Semi GV
3 way hot valve
Characteristics | Cartridge Heating Control type / Heating Jacket Mountable / Temp Controller |
---|---|
Opeation | Rotary Ball Type |
Flange Size (ID) | KF40 - 50 |
Flange Type | KF |
Feedthrough | O-Ring Seal |
Gate Seal | Viton O-Ring |
Leak rate | 1×10-8 torr ℓ/sec |
Cycles until first service | 30,000 |
Temperature for Valve Body | ≤ 180 °C |
Temperature for Actuator | ≤ 80 °C |
Materials | Stainless Steel304 , AL6061 |
Mounting Position | Any |
Operating Pressure (N2) | 1.5~7kgf/cm2 |